基于镜像异质三周期光子晶体的陀螺仪研究  

The Research of Gyroscope Based on Mirror Triply periodic Photonic Crystal Heterostructures

作　　者：彭鹏[1,2] 温廷敦[1,3,2] 许丽萍[1] 汤帅[1,2] 

机构地区：[1]中北大学理学院,太原030051 [2]中北大学电子测试技术国家重点实验室,太原030051 [3]中北大学微米纳米技术研究中心,太原030051

出　　处：《传感技术学报》2014年第1期53-57,共5页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(60776062;50730009);国家自然科学基金仪器专项基金项目(61127015)

摘　　要：对镜像异质三周期光子晶体的研究理论表明,在实际应用范围内,透射率与光子晶体所受的轴向应力呈简单的线性关系。微机械陀螺仪在工作时会产生Coriolis力,其与整个系统的输入角速度有正比关系。在陀螺仪检测梁的根部,用镜像异质三周期光子晶体作为敏感元件,只需检测出其透射率,即可知道陀螺仪所受Coriolis力的大小,继而求出系统的角速度。ANSYS软件仿真结果表明,当透射光强改变万分之一时,该结构可以感知6.5 mgn的Coriolis加速度的变化,测量量程可达55 gn。Theoretical study about mirror shows,in the actual application range,transmissivity has a simple linear re-lationship with the axial stress to photonic crystal. When micro-mechanical gyroscope works,there will be Coriolis force emerge which is in direct ratio with angular speed of the whole system. At the root of the detection beam of gy-roscope,mirror triply periodic photonic crystal is used as the sensing element. Detecting the transmissivity of the photonic crystal,the Coriolis force to the gyroscope can be calculated,and then the acceleration of the gyroscope can be found. It is shown that this structure can measure 6. 5 mgn when the transmissivity intensity changes one out of ten thousand and its measuring range is up to 55 gn by ANSYS software simulation.

关 键 词：光子晶体 微机械陀螺 CORIOLIS力 透射率 电磁驱动 弹光系数 介观压光效应 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计]