基于有限元方法的涡轮分子泵转子系统模态分析  

Modal Analysis of the Rotor System of Turbo-Molecular Pump Based on Finite-Element Method

作　　者：王晓冬[1] 孙妍[1] 方立武 李晓勇 

机构地区：[1]东北大学机械工程与自动化学院,辽宁沈阳110819 [2]北京利方达真空技术有限责任公司,北京100029

出　　处：《东北大学学报（自然科学版）》2014年第3期411-414,共4页Journal of Northeastern University(Natural Science)

基　　金：中澳国际合作项目(75113000);辽宁省自然科学基金资助项目(20102073);教育部留学回国博士基金资助项目(12933040)

摘　　要：以FB-一1500型涡轮分子泵为分析原型，依据分子泵转子系统形状、尺寸、材料、支承形式以及质量分布，建立了分子泵转子系统几何模型．采用有限元方法对转子系统进行模态分析，获得了转子系统的临界转速和振型．模态分析结果表明：泵运行在5～6阶固有频率之间，但未完全满足柔性转子安全设计要求，仍然存在安全隐患．提出改进转轴惯性矩、轴承支撑位置来提高转子系统的固有频率，以确保分子泵的安全运行．获得的转子系统模态，对涡轮分子泵启动加速和停车减速过程控制策略制定、减弱或回避共振带来的安全隐患、提高分子泵使用寿命具有参考价值．The geometric model of FB-1500 turbo-molecular pump （TMP） rotor system was established based on the construction, parameters and material of the rotor, the bearing support style and mass distribution of rotor. The critical speeds and the vibration modes were obtained by the modal analysis of TMP rotor system based on the commercial finite-element code ANSYS. The modal analysis results show that the TMP is operated between the speed of 5 and 6 order natural frequency, but it is not fully satisfy the design theory of the flexible drive system to avoid the sympathetic vibration during TMP operation. The natural frequency of TMP rotor system can be increased with the moment of inertia increasing, and a structure improvement of TMP rotor system was proposed to increase the TMP operating reliability.

关 键 词：涡轮分子泵 转子系统 临界转速 模态分析 有限元法 

分 类 号：TB752.27[一般工业技术—真空技术]