光栅刻划机刻划系统光机电集成优化方法研究  

Research on Opto-Mechatronics Integration Optimization Method of the Scatch System of the Grating Ruling Machine

作　　者：申远[1,2] 王俊杰[2] 竺长安[1] 齐向东[3] 

机构地区：[1]中国科学技术大学精密机械与精密仪器系,安徽合肥230027 [2]合肥师范学院电子信息工程学院,安徽合肥230601 [3]中国科学院长春光学精密机械与物理研究所,吉林长春130033

出　　处：《湖南大学学报（自然科学版）》2014年第3期43-48,共6页Journal of Hunan University:Natural Sciences

基　　金：'十一五'国家科技支撑计划重大项目(2006BAK03A02);国家重大科研装备研制项目(ZBYZ2008-1);中央高校基本科研业务费专项资金资助项目(WK2090090010);安徽省自然科学基金资助项目(1308085QE92);合肥师范学院人才基金资助项目(2013RCJJ04)

摘　　要：针对大面积衍射光栅刻划机在宏观尺度下进行微纳加工的工作特点以及纳米级刻线检测困难的问题,提出了一种光机电集成优化方法.此方法采用计算傅里叶光学和弦振动理论进行光栅刻线误差分析,结合振动实验及光学测量进行验证,最后采用智能优化方法对刻划系统进行结构参数优化.虚拟样机仿真结果表明,刻划系统的振动幅度降低了30%,验证了该集成优化方法的有效性.To address large diffraction grating ruling engines＇ characteristics of micro nano processing at the macroscopic scale and to solve the problem of nanometer scale detection, this paper proposed a meth od of opto-mechatronics integration optimization. Firstly, computational Fourier optics and the theory of string vibration were used in error analysis. Then, the analysis results were verified by vibration test and optical measurement. Finally, intelligent optimization methods were used to optimize structural parame ters. The validity of the opto-mechatronics integration optimization has been verified by simulating a virtu al prototype, which has shown that the vibration amplitude of the Scatch System has reduced by 30%.

关 键 词：光栅刻划机 光机电集成优化 计算傅里叶光学 智能优化 

分 类 号：TH122[机械工程—机械设计及理论]