基于双波长数字全息术的微光学元件折射率分布及面形测量  

Refractive Index Distribution and Surface Profile Measurement of Micro-Optics Based on Dual Wavelength Digital Holography

作　　者：邓丽军[1] 杨勇[1] 石炳川 马忠洪[1] 盖琦[2] 翟宏琛[1] 

机构地区：[1]南开大学现代光学研究所教育部光电信息技术科学重点实验室,天津300071 [2]天津理工大学中环信息学院,天津300380

出　　处：《光学学报》2014年第3期142-146,共5页Acta Optica Sinica

基　　金：国家自然科学基金(61227010);中央高校基本科研业务费专项资金(NKU65012161);天津市应用基础及前沿技术研究计划(11JCYBJC01400)

摘　　要：提出了一种测量微光学元件的折射率分布及面形的方法。该方法基于双波长数字全息术,将微光学元件浸入折射率匹配液降低通过微光学元件的透射光波频率,获取微光学元件在两个不同波长照明光波下的数字全息图,并根据两个波长下的相位分布,计算出微光学元件的折射率分布,利用得到的折射率分布获取微光学元件的面形。理论分析及实验结果证明了所提方法的可行性。A method based on dual wavelength digital distribution and surface profile of micro-optics elements holography is proposed to measure the refractive index Micro-optics elements are immersed in refractive index matching liquid to reduce the frequency of transmission light. The digital holograms of micro-optics elements are obtained under illumination of two different wavelengths, the refractive index distribution of micro-optics elements can be obtained according to phase distribution under two wavelengths. Surface profile of micro-optics elements can be calculated b＇ased on the refractive index distribution. Theoretical analysis and optical experimental results are performed to demonstrate its validity.

关 键 词：全息 双波长数字全息术 微光学元件 折射率匹配液 折射率分布 面形 

分 类 号：O436[机械工程—光学工程]