YBCO半导体薄膜及Bolometer特性  

STUDY ON SEMICONDUCTING YBCO THIN FILM AND CHARACTERISTICS OF BOLOMETER

作　　者：刘景和[1] 孙强[1] 刘向东 刑宏岩 李建利[1] 李国桢[2] 黄宗坦[2] 黄承彩[2] 李丹[2] 黄江平[2] 

机构地区：[1]长春光学精密机械学院,长春130022 [2]昆明物理研究所,昆明650023

出　　处：《物理学报》2000年第10期2017-2021,共5页Acta Physica Sinica

摘　　要：就Si为衬底的钇钡铜氧 (分子式 :Y1Ba2 Cu3 O7-δ,δ≥ 0 5 ,简称YBCO)薄膜的半导体性质 ,及用于红外测辐射热计 (Bolometer)的探测性能进行了研究 .通过测定温度电阻系数 (TCR)和霍尔 (Hall)系数 ,并采用XRD、拉曼散射光谱等手段分析了YBCO半导体薄膜的微观结构和光谱响应特性 ,认为该薄膜是非制冷红外焦平面的新型探测元材料 .We have studied the semiconducting property of the Y 1Ba\-2Cu\-3O\-\{7- δ \}( δ ≥0 5, abbreviated YBCO) thin film which is deposited on Si substrate and the characteristics of the bolometer using the film to detect IR radiation. We measured TCR merit and Hall coefficient and analyzed the microstructure and the responsive characteristics of the YBCO semiconducting thin film through XRD and Raman spectrum. We believe that the thin film is a new sensing material which can be applied to uncooled infrared focal plane bolometers.

关 键 词：YBCO半导体薄膜 BOLOMETER特性 微观结构 

分 类 号：O471[理学—半导体物理]