基于硅悬臂高阶谐振的动态原子力显微镜的快速扫描  

High speed scanning for dynamic atomic force microscope based on higher-order resonance of silicon cantilever

作　　者：黄强先[1] 尤焕杰[1] 袁丹[1] 赵阳[1] 胡小娟[1] 

机构地区：[1]合肥工业大学仪器科学与光电工程学院安徽合肥230009

出　　处：《光学精密工程》2014年第3期656-663,共8页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.50975075)

摘　　要：利用原子力显微镜(AFM)硅悬臂器件具有多阶谐振模态的特性,提出了基于硅悬臂高阶谐振特性构建动态AFM来实现快速扫描的方法,并研制了可工作于一阶模态和高阶模态的AFM。介绍了高阶谐振AFM系统的基本结构和工作原理,从理论上证明了利用硅悬臂梁高阶谐振特性实现快速扫描的可行性。以自制的AFM为研究对象,分析了影响动态AFM扫描速度的主要因素,对系统各模块的响应时间进行了分析、测试,并通过实验证明了AFM在二阶谐振模态下的稳定时间明显小于一阶谐振模态下的稳定时间。最后,分别用一阶、二阶谐振模态对光栅试样在同一区域的表面形貌进行了扫描测试,测试数据表明:在相同条件下,AFM的扫描速度在二阶谐振模态下约是一阶模态下的3.3倍。理论分析和实验结果证明了利用高阶谐振探针提高AFM扫描速度的可行性和有效性。On the basis of higher-order resonant characteristics of silicon cantilevers of Atomic Force Microscopes （AFMs）, a high speed scanning method for dynamic AFMs based on the higher-order resonant cantilever was put forward, and an AFM working at one-order resonant and higher-order modes was developed. The basic structure and working principle of the higher order resonant AFM system were introduced and the feasibility of the method by using the higher-order resonant character- istics of cantilever to realize high speed scanning was demonstrated theoretically. With home-built AFM as the investigated object, the main factors influencing the scanning speed of the dynamic AFM were investigated, and the response time of each system module was analyzed and estimated by tests. It is experimentally proven that the settling time of the second-order resonant mode AFM is less than that the first-order resonant mode AFM obviously. Finally, the same area of a grating sample was scanned by the first-order and the second-order mode AFMs respectively and the experimental results demonstrate that the scanning speed of the second-order mode AFM is about 3.3 times faster than that of the first-order resonant mode under the same condition. Theoretical analysis and experimental re- sults prove the feasibility and effectiveness to improve the dynamic AFM scanning speed by using the higher-order resonant cantilever.

关 键 词：原子力显微镜(AFM) 硅悬臂梁 高阶谐振 扫描速度 

分 类 号：TH742.9[机械工程—光学工程]