磁控溅射纳米纤维基银膜的结构和性能  

Structure and properties of Ag coatings on nanofibers prepared by magnetron sputtering

作　　者：李超荣[1] 舒顺新 谢勇[1] 刘秋艳[1] 

机构地区：[1]浙江理工大学先进纺织材料与制备技术教育部重点实验室,浙江杭州310018

出　　处：《纺织学报》2014年第4期32-36,共5页Journal of Textile Research

基　　金：国家自然科学基金资助项目(51172209)

摘　　要：室温条件下,采用直流磁控溅射方法,在醋酸纤维素(CA)纳米纤维表面沉积银纳米薄膜,采用扫描电子显微镜(SEM)和透射电子显微镜(TEM)对不同溅射功率的银纳米薄膜的形貌和微观结构进行表征;利用X射线衍射分析了银薄膜的结晶状态;研究了在不同溅射功率条件下制备的沉积纳米银薄膜复合纳米纤维的光学透射性能。结果表明:纳米结构银薄膜中银粒子直径较小且分散均匀,随着溅射功率的增加,银粒子尺寸增大的同时纳米薄膜的致密性和均匀性也相应的增加;制备的银薄膜均呈面心立方的多晶结构,并且其结晶性能随着溅射功率的增加而逐渐增强,同时抗紫外线透射能力也会明显增强。Nanoscale silver functional coatings were prepared on the surface of nanofiber at room temperature by DC reactive magnetron sputtering process. The surface morphology and microstructure of silver coatings prepared by using different sputtering powers were characterized by scanning electron microscopy （SEM） and transmission electron microscopy （TEM）, along with their transmisivity. X-ray diffractometry was used to examine the crystalline state of the silver coatings. The results showed that silver coatings were formed by small-sized and homogeneous particles. Increasing the sputtering power increased the size of silver particles, and accordingly increased the evenness and compactness of the coatings. The as-prepared silver coatings presented a face-centered cubic of polycrystalline structure, and with the increase of sputtering power, the crystallinty and UPF of the coatings enhanced significantly.

关 键 词：磁控溅射 纳米纤维 银薄膜 透光率 

分 类 号：TS174[轻工技术与工程—纺织材料与纺织品设计]