高精度大口径球面干涉仪光学系统的设计探讨  

Design of high precision large diameter spherical interferometer optical system

作　　者：贺军峰[1] 崔庚彦[1] 

机构地区：[1]河南工业职业技术学院,河南南阳473009

出　　处：《技术与市场》2014年第4期46-47,49,共3页Technology and Market

基　　金：河南省2013年科技发展计划;河南省科技厅;项目编号:132102210456

摘　　要：试图自行设计制造价格低廉,实用性强的大口径球面干涉仪,并可推广应用于大部分科研生产单位,解决大尺寸光学零件加工中的面型测试问题。通过对平面干涉仪的各种型式的比较和选择,达到精确测量高精度大口径光学元件的目的。采用反射式平行光管式的卧式斐索干涉仪,标准镜采用非球面消色差,光学元件少,结构简单。采用共路干涉降低了外界干扰对测量的影响,同时共光路干涉也可降低干涉仪各光学元件加工面形精度的要求。Attempt to design and manufacture of inexpensive, practical large-diameter spherical interferometer used in most of the research and production units, and can be extended to solve the problem of large-size optical parts processing face test. The comparison of the various types of the planar interferometer, selection, to achieve the purpose of accurate measurement of high-precision optical element of large caliber. Employing a reflective collimator formula horizontal Fizeau interferometer, the standard mirror aspheric achromatic optical element results simple. The common path interferometer reduce outside interference measure-ments, the total optical path interferometer can also reduce the interferometer optical components machining surface accuracy re-quirements.

关 键 词：干涉仪 非球面 光学系统 高精度 

分 类 号：TH744.3[机械工程—光学工程]