竖直向上式喷雾热分解法制备ZnO薄膜及衬底温度对其性能的影响  

ZnO Films Prepared by the Vertical Type Spray Pyrolysis Method and the Influence of Substrate Temperature on the Performance

作　　者：黎波[1] 孟祥杰[1] 任维义[1] 

机构地区：[1]西华师范大学理论物理研究所,四川南充637009

出　　处：《西华师范大学学报（自然科学版）》2014年第1期63-67,共5页Journal of China West Normal University(Natural Sciences)

基　　金：四川省科技厅基金资助项目(009JY0143)

摘　　要：以醋酸锌水溶液为前驱体溶液,使用CQUT USP-Ⅱ型双源超声热解喷涂薄膜制备系统在玻璃衬底上制备得到了温度在350℃到450℃范围内的ZnO薄膜.通过X射线衍射(XRD)和紫外-可见分光光度计测试了薄膜的晶体结构和光学性能,着重考察了衬底温度对ZnO薄膜生长过程及微观结构的影响.结果表明:温度对薄膜质量的影响较大;制备的ZnO薄膜为六角铅锌矿结构,400℃时薄膜结晶性能好,沿c轴择优取向生长;所制备的薄膜在可见光区透过率高达86%以上,在紫外光区吸收强烈;最后,用Tauc关系计算了薄膜温度在350℃到450℃范围内的帯隙能量.ZnO films were prepared on glass substrate by ultrosonic spray pyrolysis method from 350℃ to 450℃,with zinc acetate solutions used as the precursor materials.X-ray diffraction（XRD） and ultraviolet-visible spectrophotometer were employed to analyze the crystalline and optical property of the thin films.the effect of the substrate temperature on the growth mechanism and the microstructure of ZnO films were studied.The results show that the temperature has great influence on the quality of the thin films;The ZnO thin films exhibit the hexagonal wurzite polycrystalline structure.Samples have the good crystallinity and exhibit the preferential orientation along c axis to the substrate surface at 400℃.All the films have a high visible transmittance and high ultraviolet absorption value.Finally,the band gap energy of films calculated by the Tauc relationship from 350 ℃ to 450℃.

关 键 词：ZNO薄膜 超声雾化热解法(USP) 微观结构 光学性质 

分 类 号：O647[理学—物理化学]