溶胶-凝胶法制备镶嵌在SiO_2玻璃中的InAs纳米晶  

Synthesis of InAs Nanocrystals Embedded in SiO_2 Glasses by a Sol-Gel Process

作　　者：杨合情[1] 张邦劳[1] 刘守信[1] 房喻[1] 张良莹[2] 姚熹[2] 

机构地区：[1]陕西师范大学化学系 [2]西安交通大学电子材料与器件研究所,西安710049

出　　处：《化学学报》2001年第2期224-229,共6页Acta Chimica Sinica

摘　　要：以As2 O3,InCl3·4H2 O和正硅酸乙酯为原料 ,通过水解、缩聚制备了xIn2 O3-xAs2 O3- 10 0SiO2 (x =0 .5～ 7.5 )凝胶 .在氧气中加热到 45 0℃对凝胶热处理使其转化成凝胶玻璃 ,再在 2 0 0～ 5 0 0℃与氢气反应 ,结果在SiO2 凝胶玻璃中形成了立方相InAs.利用XRD测试了InAs纳米颗粒的大小 ,发现随着反应温度的升高及掺杂量的增加 ,InAs纳米颗粒粒径从 6增大到 2 9nm .InAs nanocrystals embedded in SiO2 gel - glasses were prepared by a sol - gel method. The gels synthesized through the hydrolysis of a complex solution of Si(OC2H5)(4), As2O3 and InCL3. 4H(2)O were heated at 450 degreesC in O-2 atmosphere, and then heated from 200 to 500 degreesC in H-2 atmosphere to form fine cubic InAs crystals. The size of InAs nanocrystals, determined from the line broadening of X - ray diffraction pattern, increases from 6 to 29 in diameter with heat - treatment temperature and molar ratio of InAs/SiO2 increasing. The InAs nanocrystal was found to be a polycrystal in the gel - glasses by electron diffraction pattern.

关 键 词：溶胶凝胶法 纳米颗粒 二氧化硅玻璃 砷化铟 凝胶玻璃 纳米半导体 

分 类 号：O648[理学—物理化学]