双胶合透镜法检测大相对孔径凸非球面透镜  

Testing of Large Relative Aperture Convex Aspheric Lens with Doublets

作　　者：陈钦芳[1] 马臻[1] 赵蒙[1] 方虎[1] 王虎[1] 

机构地区：[1]中国科学院西安光学精密机械研究所空间光学技术研究室,西安710119

出　　处：《光子学报》2014年第3期98-102,共5页Acta Photonica Sinica

基　　金：国家自然基金青年基金(No.61107008)资助

摘　　要：大相对孔径凸非球面的检测一直是非球面制造的难点.本文结合两片大相对孔径凸椭球面透镜的检测,提出采用同种材料胶合的检测方法,并基于该检测方法加工得到了相对孔径分别为2.7和2的两块凸椭球面透镜.经检测,两块非球面透镜检测系统的最终波像差均方根值都优于1/30λ(λ=632.8nm),在实际光学系统应用中,系统的分辨率和弥散斑大小均满足系统的指标要求.产品的使用情况验证了本文采用的同种材料胶合的检测方法在理论和实践上是可行的,与传统的光学补偿法检测大非球面度、高陡度非球面相比,本文采用的胶合透镜法极大地简化了检测系统结构,降低了系统的装调难度,是一种有效的高准确度凸非球面检测方法.It is difficult to fabricate and test convex aspherical surfaces, especially for steep convex aspheical surfaces. Based on the analysis of the conventional null test, a simple test system with cemented doublet for two steep convex ellipsoids was discussed. The wavefront of the both test system was less than 1/30λ RMS （Root Meat Square, λ=632.8 nm）. The convex aspheric lens had their successful application in practical optical system. The result showed that the null test for convex aspheric lens discussed in this paper is valid. Compared with the traditional test method, the cemented doublet offsets the spherical aberration generated by the sphere surface of the lens. So the proposed test method decreases the amount of the spherical aberration generated by the aspherical lens, with fewer elements, and reduces the system＇s alignment difficulty. It was demonstrated to be an effective, high-precision testing method.

关 键 词：光学检测 非球面 补偿法检测 胶合透镜 大相对孔径 椭球面 

分 类 号：V19[航空宇航科学与技术—人机与环境工程] O435.1[机械工程—光学工程]