HgCdTe红外焦平面探测器从研发到生产  

HgCdTe IRFPA Detectors from Research to Production

作　　者：韩福忠[1] 周连军[1] 袁绶章[1] 吴军[1] 

机构地区：[1]昆明物理研究所,云南昆明650223

出　　处：《红外技术》2014年第4期271-274,共4页Infrared Technology

摘　　要：HgCdTe红外焦平探测器经过多年的研发,已达到批量生产的水平。昆明物理研究所批量生产的第二代红外探测器产品主要是长波288×4和中波320×256两类典型的红外焦平面探测器组件。在2013年这两类组件生产的数量分别可达几百套。介绍了在红外探测器生产中所需解决的关键问题,主要是HgCdTe材料的质量及光伏器件工艺的稳定性,并介绍两类主要生产的探测器组件产品及其性能结果。HgCdTe IR-FPA detectors have been researched for many years and already reached production level. Kunming Institute of Physics mainly produces LW 288 × 4 and MW 320 × 256 infrared detector assemblies which are second generation detectors. Hundreds of the two kinds of detector assemblies are produced in 2013. In this paper, the main problems needed to be resolved in the process of producing the IR detectors are discussed, including the quality of HgCdTe material and stability of photovoltaic detector process. Also, such two kinds of detectors and their performance are introduced.

关 键 词：红外焦平面 HGCDTE 离子注入 制冷型探测器 噪声等效温差 

分 类 号：TN215[电子电信—物理电子学]