不同柔性衬底上CdS薄膜退火前后的性能比较  

Comparison of CdS thin films on different flexible substrates before and after annealing

作　　者：丛家铭[1] 潘永强[1] 邬云华 张传军 王善力 

机构地区：[1]西安工业大学光电工程学院,陕西西安710032 [2]上海太阳能电池研究与发展中心,上海201201

出　　处：《红外与激光工程》2014年第4期1235-1239,共5页Infrared and Laser Engineering

基　　金：中国科学院知识创新工程重要方向项目(KGCX2-YW-384);上海市2012年度"科技创新行动计划"节能减排领域项目(12dz1201000)

摘　　要：采用磁控溅射法分别在柔性PI衬底、柔性AZO衬底和柔性ITO衬底上制备CdS薄膜,并在干燥空气中以CdCl2为源380℃退火,分别研究了不同柔性衬底及退火工艺对CdS薄膜形貌、结构和光学性能的影响。研究结果表明:退火前在不同柔性衬底上的CdS薄膜形貌依赖于衬底类型,退火后CdS薄膜的晶粒再结晶,晶粒度增大明显,且不再依赖于衬底类型。不同柔性衬底上CdS薄膜均为立方相和六角相的混相结构,退火后,六角相比例增大,薄膜的结晶质量提高。透过率退火后改善明显,其中,在柔性AZO衬底上的CdS薄膜透过率超过80%。The CdS thin films were prepared on Flexible PI、AZO and ITO substrates by r.f. magnetron sputtering technique,and annealed at 380℃ in CdCl2 and dry air. The morphology, structure and optical properties of all samples were characterized by the scanning electron microscopy, X-ray diffraction and ultraviolet-visible spectroscopy. The results show that the microstructures of all the CdS thin films dependent on the type of substrate by as-deposited and annealed CdS thin films on different substrates, grain recrystallizes, grain size increases significantly and no longer depend on the substrate type. The entire prepared CdS thin films show a mixed phase structure of cubic and hexagonal. After annealing, the proportion of hexagonal phase is increased, the crystallization quality of CdS thin film is improved. The optical transmittance changes obviously after annealing, among them, the optical transmittance of CdS thin film on flexible AZO substrate is over 80%.

关 键 词：柔性衬底 CDS薄膜 磁控溅射 退火处理 

分 类 号：O484.4[理学—固体物理]