基于低温共烧陶瓷的无线无源传感器设计  

Design of wireless passive sensor based on LTCC

作　　者：杨明亮[1,2] 谭秋林[1,2] 熊继军[1,2] 康昊[1,2] 李晨[1,2] 

机构地区：[1]中北大学电子测试技术国家重点实验室,山西太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《传感器与微系统》2014年第5期69-72,共4页Transducer and Microsystem Technologies

基　　金：国家"973"计划前期资助项目(2010CB334700)

摘　　要：设计一种基于低温共烧陶瓷(LTCC)的无线无源压力传感器。电感器和电容器并联组成的LC谐振回路构成传感器的工作电路,采用厚膜工艺完成了平面螺旋电感器和平行板电容器的制备。传感器利用LC谐振回路的谐振频率对不同压力的响应来表征传感器的应变特性,采用2个电感耦合的方式来实现无线检测。测试结果显示:传感器的谐振频率随外加压力的增大而减小,其谐振频率变化对压力的响应灵敏度约为331.70 kHz/bar。A wireless passive pressure sensor based on low temperature co-fired ceramic （LTCC） is designed. The working circuit of sensor is composed of a LC resonant circuit ,which consists of an inductor and a capacitor in parallel, and a planar spiral inductor and a parallel plate capacitor is fabricated by thick-film process. The strain characteristic of the sensor is based on the response of resonance frequency of the LC circuit to the applied pressure, and wireless detection is realized by electromagnetic coupling with two inductances. Test results show that the resonance frequency of sensor decreases with the increase of pressure, and response sensitivity of the resonance frequency to pressure is about 331.70 kHz/bar.

关 键 词：低温共烧陶瓷 无线无源 无线检测 平面螺旋电感 平行板电容器 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]