适用于电容式MEMS传感器的微小电容检测系统  

A tiny capacitance detection system applied in capacitive MEMS sensor

作　　者：王宇[1] 张晓明 白渚铨[1] 赵鑫炉[1] 

机构地区：[1]中北大学电子测试技术国防科技重点实验室,山西太原030051

出　　处：《电子技术应用》2014年第5期90-92,96,共4页Application of Electronic Technique

基　　金：国家自然基金(61171056)

摘　　要：针对电容式微机械陀螺测量困难的问题,设计了基于电容检测芯片AD7747和STM21F405单片机组合的微小电容检测系统。该系统主要包括I2C数据通信模块、串口通信模块、Flash存储模块以及单片机控制模块。最后通过实验来对其性能进行测试可得,该系统能够实现对微小电容的精确测量,分辨率可达1.6 fF,能够满足对电容式MEMS器件微弱信号的检测。According to the measurement difficulties of capacitive micro-machined gyro-scope, a tiny capacitance detection sys tem based on capacitive sensing chip AD7747 and STM21F405 microcontroller was designed. The system includes I2C data commu nication module, serial communication modules, Flash memory modules and single-chip control module. Finally, an experiment was designed to test the properties of the system. Experiments show that the system has a high resolution and accurate measurement. The resolution can reach 1.6fF which can meets the requirement of detecting weak signals to the capacitive MEMS device.

关 键 词：微小电容 AD7747 MEMS传感器 STM32F405 

分 类 号：TP206[自动化与计算机技术—检测技术与自动化装置]