不同工艺线性稳压器电离辐射效应及退火特性  

Ionizing Radiation Effects and Annealing Characteristics of Linear Regulators in Different Processes

作　　者：孙江超[1] 张小玲[1] 张彦秀 谢雪松[1] 吕曼[1] 吕长志[1] 

机构地区：[1]北京工业大学,北京100124 [2]北京燕东微电子有限公司,北京100015

出　　处：《微电子学》2014年第2期253-255,259,共4页Microelectronics

摘　　要：研究掺氯氧化+PE钝化、无氯氧化+PE钝化、掺氯氧化+BPSG钝化三种不同工艺线性稳压器的电离辐照响应及退火特性。实验结果发现,掺氯氧化+BPSG钝化工艺样品比其他两种工艺电离损伤明显减小,具有较强的抑制电离辐射损伤的能力。退火实验表明,辐射感生的界面态是影响稳压器电离辐射性能的主要因素,减少界面态可大大提高器件抑制电离辐射损伤的能力。Ionizing radiation effects and annealing characteristics of linear regulators fabricated with 3different processes：blending chlorine oxidation＋ PE passivation,no chlorine oxidation＋ PE passivation,blending chlorine oxidation＋ BPSG passivation,were studied.It has been shown that the regulator with blending chlorine oxidation ＋ BPSG passivation had stronger capability to inhibit ionizing radiation than the other two processes.Annealing experiments showed that radiation induced interface state was the major factor to affect performance of the regulator,and so,the capability of the device to suppress ionizing radiation damage could be enhanced by reducing interface states.

关 键 词：线性稳压器 电离辐射损伤 BPSG钝化 辐射加固 

分 类 号：TN322.8[电子电信—物理电子学]