A mask-less scheme to generate nano-honeycomb-textured structures for solar cells  

作　　者：Jie Liu Bangwu Liu Sihua Zhong Jinhu Liu Yang Xia Chaobo Li 

机构地区：[1]Key Laboratory of Microelectronics Devices & Integrated Technology,Institute of Microelectronics,Chinese Academy of Sciences

出　　处：《Chinese Science Bulletin》2014年第14期1575-1579,共5页

基　　金：supported by the National Natural Science Foundation of China(607227003 and 61106060);the Instrument Developing Project of the Chinese Academy Sciences(YZ200755)

摘　　要：Honeycomb structure is extraordinarily effective to trap light,and the efficiency of solar cell with this texture is as high as 24.4%.In this paper,plasma immersion ion implantation and acid etching are applied to texture multi-crystalline silicon.Surface reflectivity and surface morphology are investigated by UV–Vis–NIR spectrophotometer and field emission scanning electron microscopy,respectively.We found that random nano-honeycomb structures have been formed on silicon surface.The weighted average reflectance is 7.68%from 300 to 1,100 nm wavelength region.We obtained honeycomb-textured solar cells following standard fabrication protocol.These solar cells show obvious better performance in short circuit current density([5.4%)and efficiency(*0.8%absolute)compared with acid-textured cell,while other performance parameters,such as open circuit voltage and fill factor,are not deteriorated.Honeycomb structure is extraordinarily effective to trap light, and the efficiency of solar cell with this texture is as high as 24.4 %. In this paper, plasma immersion ion implantation and acid etching are applied to texture multi-crystalline silicon. Surface reflectivity and surface morphology are investigated by UV-Vis-NIR spectrophotometer and field emission scanning electron microscopy, respectively. We found that random nano-honeycomb structures have been formed on silicon surface. The weighted average reflectance is 7.68 % from 300 to 1,100 nm wave- length region. We obtained honeycomb-textured solar cells following standard fabrication protocol. These solar cells show obvious better performance in short circuit current density （〉5.4 %） and efficiency （~ 0.8 % absolute） compared with acid-textured cell, while other performance parameters, such as open circuit voltage and fill factor, are not deteriorated.

关 键 词：太阳能电池 纹理结构 纳米 等离子体浸没离子注入 场发射扫描电子显微镜 红外分光光度计 蜂巢 口罩 

分 类 号：TM914.4[电气工程—电力电子与电力传动] TS213.21[轻工技术与工程—粮食、油脂及植物蛋白工程]