基于转写技术的微针阵列制备与强度特性测试  

Fabrication and Strength Test of Micro Needle Array Based on Molding Technology

作　　者：李以贵[1] 谢长生 廖哲勋[3] 朱军[3] 

机构地区：[1]上海应用技术学院理学院,上海201418 [2]上海航天控制技术研究所,上海200233 [3]上海交通大学微纳科学技术研究院,上海200240

出　　处：《纳米技术与精密工程》2014年第3期194-201,共8页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(51035005)

摘　　要：为达到低成本、批量化制备微针阵列的目的,提出了一种分别制备微针针尖模具和微针立柱模具的微针模具制备方法.制备微针针尖硅模具是采用湿法刻蚀方法,SU-8微针的立柱部分则采用套刻工艺制备.以此模具为母版,采用聚二甲基硅氧烷(PDMS)二次转写技术获得PDMS二次母版.以PDMS母版为模具,分别用浇铸法制备了3种不同聚合物材料(左旋聚乳酸(PLLA),聚苯乙烯(PS),透明质酸(HA))的微针阵列;还以PDMS母版为模具,用电铸法制备了金属Ni微针阵列.该微针阵列的密度约为300根针/cm2.对制备的4种微针进行力学特性测试,实验结果表明,加工出的微针有足够的力学强度,可用于无痛注射.To achieve low cost and batch production of micro needle array, a micro needle mold fabrica- tion method was described. The micro needle mold includes two parts, the tip part and the column part. The tip part was fabricated by silicon wet etching, and the column part by SU-8 lithography. Polydimeth- ylsiloxane （PDMS） mold was fabricated by molding technology from the silicon micro needle mold. Using the PDMS mold as master mold, three micro needle arrays were prepared with three different polymers [ poly （ L-lactic-acid ） （ PLLA ）, polystyrene （ PS ）, and hyaluronic acid （ HA ） ] respectively ; also by PDMS master mold, nickel micro needle array was fabricated by using electroforming process. The micro needle array density is about 300 pin/cm2. The mechanical properties of the four kinds of micro needles were tested. Experimental results show that the mechanical strength of the micro needle is strong enough to be used in painless injection.

关 键 词：微针模具 微针阵列 PDMS二次转写 聚合物 强度测试 

分 类 号：TH-39[机械工程]