钙钛矿型铁电薄膜疲劳特性研究进展  

The Fatigue Characteristics of Perovskite Ferroelectric Thin Films

作　　者：林家齐[1] 何霞霞 杨文龙[1] 崔洋[1] 

机构地区：[1]哈尔滨理工大学应用科学学院,黑龙江哈尔滨150080

出　　处：《哈尔滨理工大学学报》2014年第2期90-94,共5页Journal of Harbin University of Science and Technology

基　　金：国家自然科学基金(61372013)

摘　　要：针对铁电薄膜极化疲劳的问题,详细综述了其疲劳机理及其影响因素.给出了影响铁电薄膜疲劳的因素,该因素可分为内在因素和外在因素两大类.重点讨论了外在因素元素掺杂、电极、界面层优化、温度及气氛等的影响,并提出了相应的改善薄膜疲劳性能的措施.比较实用有效的方法是在金属电极和薄膜之间沉积一层与薄膜晶格参数接近的界面层.最后结合自身研究工作,指出建立界面层设计-微结构演变-疲劳性能之间的关系是我们以后重点关注的问题.To solve the problem of ferroelectric thin film polarization fatigue,the fatigue mechanisms and influential factors on ferroelectric thin films are reviewed in detail.There are many influencing factors on ferroelectric thin film fatigue,which can be divided into intrinsic factor and the external factor.The external factor mainly consists of the element to dope,the electrode,the boundary layer optimization,the temperature and the atmosphere.This article is focused on external factor influence,and the corresponding measures to improve film fatigue performance are proposed,among which the most effective measure is the boundary layer optimization between the metal electrode and the thin film with the thin film lattice parameter close to transitional layer.This article enhances the boundary layer optimization method.Finally combining with the work itself,we point out that establishing the relationship among the design of interface layer,microstructure evolution and the fatigue performance is our key problems in the future.

关 键 词：钙钛矿结构 铁电薄膜 疲劳特性 界面优化 

分 类 号：O484[理学—固体物理]