衍射光学元件的加工工艺及其在各种光谱镜头中的应用  

Fabrication Technology and Application in Spectral Lens of Diffractive Optical Elements

作　　者：程习敏[1,2] 白瑜[1,3,2] 谢伟民[1] 邢廷文[1] 林妩媚[1] 

机构地区：[1]中国科学院光电技术研究所,四川成都610209 [2]中国科学院大学,北京100049 [3]电子科技大学光电信息学院,四川成都610054

出　　处：《光电技术应用》2014年第2期31-38,65,共9页Electro-Optic Technology Application

基　　金：国家自然科学基金(10874181)资助

摘　　要：综述了当前衍射光学元件的加工制作工艺方法,包括光刻法、薄膜沉积法、直写法、金刚石车削法、准分子激光加工法、灰阶掩模法和复制法。详细说明了这几种方法加工衍射光学元件的工艺过程,并分析了各种加工方法的优缺点。介绍了衍射光学元件在各种光谱镜头中的应用,分别给出了衍射面在可见光波段、红外波段和紫外波段系统中的具体设计实例。最后得出结论,说明衍射光学元件可以增加设计自由度,简化系统结构,减小体积,减轻质量,改善像差,提高系统成像质量。The fabrication technologies of diffractive optical elements such as photolithography, thin-film depo-sition, direct writing, diamond turning, excimer laser etching, gray-tone mask and replication are summarized. Thetechnology processes of the methods for fabricating diffractive optical elements are introduced in detail. And the ad-vantages and disadvantages of the methods are analyzed. The applications of diffractive optical elements in spectrallens are introduced. The detailed design examples of diffractive surface in the waveband of visible, infrared and ul-traviolet spectrum are described respectively. The conclusion shows that diffractive optical elements can help to in-crease design freedom, simplify system structure, reduce system volume and weight, and improve system astigma-tion and imaging quality.

关 键 词：衍射光学 光刻 薄膜沉积 金刚石车削 

分 类 号：O436[机械工程—光学工程]