双光束复合脉冲激光辐照沉积纳米金刚石薄膜  

Deposition of Nano-Diamond Film by Double Beam Pulse Laser Irradiation of Graphite Suspension

作　　者：杨慧敏[1] 任旭东[1] 郑腊梅[1] 任乃飞[1] 唐少雄[1] 

机构地区：[1]江苏大学机械工程学院,江苏镇江212013

出　　处：《中国激光》2014年第5期160-163,共4页Chinese Journal of Lasers

基　　金：国家自然科学基金(51275556);江苏省六大人才高峰计划(2012-ZBZZ-025);江苏大学科研立项资助项目(12A378)

摘　　要：利用双光束复合脉冲激光辐照石墨悬浮液沉积技术,制备了高效率、高质量的纳米金刚石薄膜,成功解决了金刚石薄膜沉积不均匀和衬底温度对金刚石薄膜的影响。通过拉曼光谱仪和高分辨率透射电镜对薄膜的微观结构和组成进行了检测分析,实验结果表明,Raman光谱的D峰出现在1334cm-1处,G峰出现在1571cm-1处,沉积的薄膜致密均匀,晶粒平均尺寸在5nm左右。在制备过程中通过复合激光束辅以温度为金刚石薄膜的生长提供了更有利的条件,并在常温常压下连续制备出了粒度分布均匀的纳米金刚石薄膜。High-quality and large area nano-diamond film is prepared via double beam pulse laser irradiation of graphite suspension. The inhomogeneity of diamond films and influence of substrate temperature are improved. The microstructure and composition of the diamond films are detected by the visible Raman spectroscopy and higher solution transmission electron microscopy. The experimental result demonstrates that the Raman spectroscopy reveals that disorder peak is at 1334 cm -1 and graphite peak is at 1571 cm -1, the diamond film is compact and homogeneous, its average crystalline grains are around 5 nm. The composite beam provides moderate temperature for the growth of diamond films, and the continuous synthesis of homogeneous nano-diamond films is realized at normal temperatures and pressures.

关 键 词：薄膜 纳米金刚石薄膜 双光束脉冲激光沉积 衬底温度 

分 类 号：TN249[电子电信—物理电子学] O484[理学—固体物理]