亚微米高精度曲率半径测量及其不确定度分析  

Sub-Micron Precision Measurement of Radius of Curvature and Uncertainties Analysis

作　　者：彭石军[1] 苗二龙[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033

出　　处：《光学学报》2014年第5期97-104,共8页Acta Optica Sinica

基　　金：国家科技重大专项(2009ZX02205)

摘　　要：针对高精度光学系统的需求,利用立式Fizeau型干涉仪,结合双频激光测长干涉仪,实现了亚微米量级的高精度曲率半径的测量。为了验证该测量系统的可靠性,分别使用两个参考镜对一系列不同曲率半径的光学零件进行了检测。对产生测量误差的主要因素进行了详细分析,以SiC小球为例,结合不确定度理论,得到测量结果的不确定度约为0.13μm(假设是正态分布,置信水平约为95%),证明该测量系统满足亚微米测量精度要求。通过三坐标测量机对同一元件的交叉检测,验证了该系统测量结果的准确性。For the demanding of high precision optical system, a vertical Fizeau type interferometer, combining with dual-frequency laser displacement measuring interferometer, achieve submicron precision measurement of radius of curvature （ROC） in this article. In order to verify the credibility of the measurement system, a series of optical parts with different ROC are measured by two different reference transmission spherical respectively. Take the polished SiC sphere as an example, the main factors causing the measurement errors are analyzed in detail. Combining with the uncertainty theory, the uncertainties of the measurement results of ROC for SiC sphere is about 0.13 ~m （a level of confidence of approximately 95% assuming a normal distribution）, which demonstrate the measurement system meets the requirement of sub-micron accuracy measurement of ROC. The correctness of the final results measured is verified through the cross measurement of the same component by the coordinate measurement machine.

关 键 词：测量 曲率半径 立式干涉仪 不确定度 交叉测量 

分 类 号：TH741[机械工程—光学工程] O436.1[机械工程—仪器科学与技术]