基于高阶谐振悬臂的动态原子力显微镜的研制  

Tapping mode dynamic atomic force microscopy based on higher-order resonance cantilever

作　　者：赵阳[1,2] 黄强先[1] 

机构地区：[1]合肥工业大学仪器科学与光电工程学院,合肥230009 [2]安徽建筑大学电子与信息工程学院,合肥230601

出　　处：《低温与超导》2014年第5期88-92,共5页Cryogenics and Superconductivity

基　　金：国家自然科学基金资助项目(50975075)资助

摘　　要：动态原子力显微镜微悬臂为无限自由度系统,具有多个谐振模态的振动特性。微悬臂的工作振动频率是影响动态原子力显微镜系统的测量特性的关键参数之一,为了提高微悬臂的谐振频率,结合悬臂的高阶谐振特性,研制了基于高阶谐振悬臂的轻敲式动态原子力显微镜,可实现对微观表面的测量,并且明显改善了动态原子力显微镜系统的测量灵敏度、测量速度等测量特性。Shapes of resonators can affect the pressure ratio and the resonance frequency. In this paper, we had a simple theoretical analysis on the sound field of diameter changeable tubes. It concluded that reducer could increase the pressure ratio. Fluid fields in different reducer and expander tubes were calculated, and the results were compared with a straight tube under the same conditions. It shows that the reducer taper tubes and the reducer exponential tubes can obviously enhance the pressure ratio and decrease the resonance frequency of the tube.

关 键 词：高阶谐振 轻敲模式 幅值反馈控制 动态原子力显微镜 

分 类 号：TN752[电子电信—电路与系统]