CMOS兼容高Q值微机电系统悬浮片上螺旋电感  

CMOS-compatible High-Q Micro-electro-mechanical System Suspended on-chip Spiral Inductor

作　　者：卢冲赢[1] 徐立新[1] 李建华[1,2] 付博 欧修龙 

机构地区：[1]北京理工大学机电动态控制重点实验室,北京100081 [2]淮海工业集团有限公司,山西长治046012

出　　处：《兵工学报》2014年第5期634-639,共6页Acta Armamentarii

摘　　要：利用微机电系统（MEMS）表面微加工技术设计并制作了一种应用于无线电引信射频前端的CMOS兼容高Q值悬浮片上螺旋电感.电感的制作工艺在热预算和材料选择上均具有良好的CMOS兼容特性.通过采用铜金属悬浮线圈结构减小了片上螺旋电感损耗因素,显著提高了片上螺旋电感Q值.采用电磁场有限元分析软件HFSS对该电感模型进行了仿真研究,完成了悬浮片上螺旋电感的制备并进行了测量.测量结果表明：所设计的CMOS兼容MEMS悬浮片上螺旋电感Q值在1～7.6GHz测量频段均大于20,在7.4 GHz频段最大值达到了38.A COMS-compatible high Q-factor suspended on-chip spiral inductor used in the radio frequency front-end of radio fuze is designed and fabricated using the micro-electro-mechanical system （MEMS） surface-micromachining technology. The fabrication process of inductor is compatible with CMOS in the aspects of both thermal budget and materials. The loss factors of on-chip spiral inductor are reduced by using a suspended copper coil, and the Q-factor is significantly improved. The improved inductor model is analyzed by the electromagnetic finite element analysis software HFSS. The MEMS suspended on-chip inductor is measured. The measurement results show that the Q-factor of inductor is more than 20 in the frequency range of 1 - 7.6 GHz and reaches 38 at 7.4 GHz.

关 键 词：兵器科学与技术 微机电系统 CMOS兼容工艺 悬浮片上螺旋电感 Q值 无线电引信 

分 类 号：TN40[电子电信—微电子学与固体电子学] TN405