铁硅铝/锰锌铁氧体复合软磁薄膜成型工艺及磁性能研究  

The modeling process and properties of a compound soft magnetic thin film based on FeSiAl/ZnMn ferrite

作　　者：谢辅强 丁桂甫[1] 汪红[1] 程萍[1] 王艳[1] 

机构地区：[1]上海交通大学微纳科学技术研究院薄膜与微细技术教育部重点实验室微米/纳米加工技术国家级重点实验室,上海200240

出　　处：《功能材料》2014年第10期109-112,118,共5页Journal of Functional Materials

基　　金：上海市科技发展基金资助项目(11DZ2290203)

摘　　要：研究了基于高饱和磁感应强度的铁硅铝软磁材料的复合软磁材料薄膜的低温成型工艺和磁性能。绝缘包覆工艺上,使用高电阻率的锰锌铁氧体软磁粉末做绝缘剂。粘结工艺上,使用水玻璃做粘结剂,低温固化粘结。与传统工艺比,低温成型工艺与微加工工艺兼容。应用该工艺制作了软磁薄膜,采用超景深三维显微系统VHX-2000观测复合材料的微观结构;运用振动样品磁强计测试薄膜的静态磁性能参数;使用交流磁化率测量仪测试薄膜动态磁性能参数。针对软磁磁粉颗粒度、绝缘包覆、粘结成型等不同工艺因素,制作了薄膜样品,总结了不同工艺因素对薄膜综合磁性能的影响。This paper introduces the general magnetic properties and a new low temperature modeling process of a special compound soft magnetic film based on FeSiAl powder.In this experiment,the ZnMn ferrite soft mag-netic powder with high resistivity was insulator.Waterglass was used as binder for low temperature modeling. Compared with conventional process,low temperature modeling process was compatible with micro-nano fabri-cation.In the end,we use microscope system VHX-2000 to observe the micro structure of the compound mate-rial.The static magnetic parameters will be tested by using the module of PPMS （physical property measure-ment system）called VSM （vibrating sample magnetometer）.The dynamic magnetic parameters will be tested by the ACMS （alternating current magnetization susceptibility）instrument.In the end,we make the final prac-tical sample with different technical elements.These elements include particle size of the powder,the content of insulator as well as the content of the binder.After test and analysis of the result data,we make conclusions on the relationship between the technical elements and its effect on the general magnetic properties.

关 键 词：复合软磁材料薄膜 综合磁性能 绝缘剂 粘结剂 低温成型 

分 类 号：TB333[一般工业技术—材料科学与工程]