类金刚石薄膜对Low-E玻璃可加工性能的影响  

Impact on Workability of Low-E Glass Produced by Diamond-like Carbon Films

作　　者：王箭[1,2,3] 汪洪[1,2,3] 余刚[1,2,3] 黄星烨[1,2,3] 

机构地区：[1]中国建筑材料科学研究总院,北京100024 [2]国家玻璃深加工工程技术中心,北京100024 [3]绿色建筑材料国家重点实验室,北京100024

出　　处：《武汉理工大学学报》2014年第4期6-11,共6页Journal of Wuhan University of Technology

基　　金：国家自然科学基金(51272245)

摘　　要：采用射频等离子体增强化学气相沉积法（RF-PECVD），在Low-E玻璃表面沉积了类金刚石（DLC）薄膜作为保护层。通过摩擦磨损实验研究DLC膜对Low-E玻璃耐磨性的影响；对沉积了DLC膜的Low-E玻璃进行热处理，研究热处理后Low-E玻璃低辐射性能和光学性能的变化。结果表明，DLC膜沉积速率为2．5～4nm／min，沉积时间4min以上时，Low-E玻璃摩擦系数开始降低到0．5以下，玻璃表面无破裂迹象，说明一定厚度DLC膜能够有效降低Low-E玻璃摩擦系数，提高Low-E玻璃耐磨性；热处理后，沉积不同时间DLC膜的Low-E玻璃与未沉积DLC膜的Low-E玻璃相比，方块电阻最大相差0．04Ω／□，E值最大相差0．0019，膜面反射、玻面反射、透过颜色△E值均小于3CIELAB，说明DLC膜可以通过热处理去除，且热处理后的Low-E玻璃低辐射性能和光学性能未受到影响。Diamond-like carbon films were deposited on Low-E glass as a protective coating by the radio frequency plasma enhanced chemical vapor deposition （RF-PECVD）. Wear resistance of Low-E glass with DLC films was studied by friction and wear experiments. The low emissivity and optical properties of Low-E glass were studied after heat treatment. The experimental results show that the deposition rate of DLC films is 2. 5 -4 nm/min, when the deposition time is above four minutes, the friction coefficient of Low-E glass begins to decrease to below 0. 5 and no cracks appears on the surface of Low-E glass, so a certain thickness of the DLC films can effectively reduce the friction coefficient and improve the wear resistance of Low-E glass. The maximum difference of sheet resistance and E value between Low-E glass with DLC films and without DLC films deposited on it under different times are 0. 04 Ω/□ and 0. 001 9, respectively. AE of reflected color of glass face, reflected color of film face and transmitted color are all less than 3 CIELAB, therefore DLC films can be removed by heat treatment, and the low emissivity and optical properties of Low-E glass are not affected after heat treatment.

关 键 词：类金刚石薄膜 LOW-E玻璃 耐磨性 热稳定性 

分 类 号：O484[理学—固体物理]