平面干涉仪检测立方体直角误差的方法  

Detection method for the cube right angle errors with plane interferometer

作　　者：刘树民[1] 

机构地区：[1]南京理工大学军工试验中心,南京210094

出　　处：《光学技术》2014年第3期286-288,共3页Optical Technique

摘　　要：介绍一种使用平面干涉仪对立方体直角误差的测量方法。利用激光干涉测量方法具有精度高和灵敏度高的特点,制做一个放置立方体的夹具,使其测试光路在立方体内经反射后又由入射面出射,当与测试平行光重合时形成干涉,实现用平面干涉仪对立方体直角误差的检测。同时,也可对立方体表面平面度、玻璃材质缺陷等指标进行判别。具有与棱镜透镜干涉仪检测立方体直角误差的同等效果。A method for measuring cube right angle errors with planar interferometer is introduced. Laser interferom- eter measurement method has high precision and high sensitivity. A cube bearing fixture is fabricated to ensure the meas- uring light can outgo from the incident plane after reflection in the cube. When the outgoing light coincides with parallel measuring light, interference is formed and cube right angle errors A90° are measured with planar interferometer. Mean- while, indicators such as surface flatness of the cube and defects in the glass can also be judged at the same time. The method equates to prism lens interferometer in the cube right angle errors measuring.

关 键 词：平面干涉仪 测量 立方体 直角误差 

分 类 号：TH161.11[机械工程—机械制造及自动化]