库仑测厚仪十年来的进步和发展  

Progress and Development of Coulomb Thickness Measuring Instrument in the Past Ten Years

作　　者：凌国伟[1] 李光 

机构地区：[1]武汉材料保护研究所,湖北武汉430017 [2]武汉恒顺材料表面技术中心,湖北武汉430017

出　　处：《电镀与精饰》2014年第6期13-17,共5页Plating & Finishing

摘　　要：回顾了传统库仑测厚技术存在的问题,特别是因环境温度变化导致测量电位变化,进而影响测量终点的判定,导致测量误差。全面介绍了电脑智能型库仑测厚仪的进步和发展,从降低测量误差和增大测量范围列举了应用实例,并展望了今后测厚技术的发展。Problems of traditional coulomb thickness measuring instrument were reviewed. For the traditional instrument, temperature movement will cause the change of measuring potential and further affects the determination of measurement endpoint which may lead to measurement error. In this paper, progress and development of intelligent coulomb thickness measuring instrument were comprehensively introduced, the application examples were enumerated from measurement error reducing and measurement range increasing. Also, the future development of thickness measurement technology was prospected.

关 键 词：阳极溶解 厚度测量 库仑测厚仪 智能型 

分 类 号：TQ016.5[化学工程]