L波段薄膜体声波谐振器纵波谐振频率计算  

Longitudinal Wave Resonant Frequency Calculation of L-Band Film Bulk Acoustic Resonator

作　　者：何移[1,2] 高杨[2,3] 周斌[1,3] 何婉婧[1] 李君儒[1] 

机构地区：[1]西南科技大学信息工程学院,四川绵阳621010 [2]中国工程物理研究院电子工程研究所,四川绵阳621900 [3]重庆大学新型微纳器件与系统技术国防重点学科实验室,重庆400044

出　　处：《压电与声光》2014年第3期331-334,共4页Piezoelectrics & Acoustooptics

基　　金：中国工程物理研究院超精密加工技术重点实验室基金资助项目(2012CJMZZ00009);重庆大学新型微纳器件与系统技术国防重点学科实验室访问学者基金资助项目(2013MS04);西南科技大学制造过程测试技术省部共建教育部重点实验室开放课题基金资助项目(11ZXZK03);西南科技大学研究生创新基金资助项目(13ycjj31;13ycjj36)

摘　　要：薄膜体声波谐振器(FBAR)电极层和压电层的厚度、材料是影响谐振频率的主要因素,确定各层的厚度和材料可得到期望的谐振频率。通过推导FBAR纵向运动应力方程,得到各层厚度、材料、频率参数与角频率相关的公式;采用MATLAB对FBAR各层应力和位移的边界、连续性条件方程组的行列式进行牛顿迭代,得到各层的频率参数。将确定的各层厚度、材料参数值及由牛顿迭代得到的频率参数值代入公式,可以得出谐振频率为1.453 8GHz。采用ADS对具有与公式计算相同厚度、材料的FBAR进行纵向振动Mason模型等效电路仿真,得到仿真模型的谐振频率为1.463GHz。仿真验证结果表明,谐振频率公式计算值和模型仿真值较近,可采用频率公式计算L波段FBAR纵波谐振频率。Thickness and material of electrode and piezoelectric film of the Film Bulk Acoustic Resonator （FBAR） are main influence factors of resonant frequency, desired resonance frequency can be achieved by confirming thickness and material. A formula about thickness, material, frequency parameter and angular frequency has been achieved by deriving stress-equation of motion in longitudinal wave of film bulk acoustic resonator; frequency parameter has been obtained from Newton iteration of determinant of stress and displacement boundary conditions equations simulated by the MATLAB. Determined thickness, material and frequency parameter which is obtained by Newton iteration has been substituted into formula, and the resonant frequency calculation value is 1. 453 8 GHz. Equivalent circuit of longitudinal vibration Mason model which has the same thickness, material with formula calculation has been simulated by ADS, and resonant frequency of simulation model is 1. 463 GHz. Verification simulation of equivalent circuit of longitudinal vibration Mason model shows that the resonant frequency calculation value by formula and the simulation value of model are very similar, and we can use the formula to calculate longitudinal wave resonance frequency of L band FBAR.

关 键 词：薄膜体声波谐振器(FBAR) 谐振频率 牛顿迭代 MATLAB Mason模型 ADS仿真 

分 类 号：TN713.2[电子电信—电路与系统]