软X射线多层膜界面粗糙度的计算  

Calculation of Interfacial Roughness of Multilayers

作　　者：冯仕猛[1] 邵建达[1] 赵强[1] 汤兆胜[1] 范正修[1] 

机构地区：[1]中国科学院上海光机所,上海201800

出　　处：《中国激光》2001年第3期249-252,共4页Chinese Journal of Lasers

摘　　要：提出一个在小角范围内计算多层膜界面粗糙度的理论计算公式 ,通过不同样品的小角度衍射曲线进行计算 ,结果表明由该公式根据不同周期、不同级次衍射峰计算的粗糙度相差比较小 ,而在相同条件下用已报道公式给出结果相差比较大。该理论公式获得的计算结果与实际观测结果比较一致。This paper gives a simple formula for calculating the roughness of multilayer by using the small angle X-ray diffraction curves of the samples. The differences of the calculated values of roughness from the formula for the different pairs of peaks of a diffraction curve of the sample of different samples are very little, but the differences from B. Abples' formula are considerably large. The calculated results are also in good conformity with the measured values reported.

关 键 词：多层膜 衍射强度 粗糙度 软X射线 

分 类 号：O484.5[理学—固体物理]