十字片簧弹性支承机构的设计  

Optimlzation design of elastic bearing mechanism with cross leaf spring

作　　者：白立芬[1] 李庆祥[1] 于水[1] 薛实福[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《机械设计》2001年第3期18-19,30,共3页Journal of Machine Design

基　　金：国家重大基础研究资助项目 !(G1 9990 3 - 0 7)

摘　　要：首先建立了接触式台阶测量仪中关键部件———十字片簧支承的杠杆机构的数学模型并对其进行初步设计。直片簧应力有限元分析表明 ,该结构应力分布很不均匀 ;经片簧参数的改进设计 ,得出变截面片簧的设计参数。 0 .2N外加载荷作用下 ,采用Algor有限元软件分别对变截面片簧进行仿真实验 ,最大、最小应力之比由直片簧的 3 1.4降低为7.7,扭转刚度为 0 .0 6N·m ,测量力变化率为 3 6.6N/m 。First of all this paper established a mathematical model of the key parts of a contact typed step measuring instrument——a lever mechanism with cross leaf spring support——and carried on a preliminary design of this mechanism. The stress finite element analysis of straight leaf spring shows that the stress distribution of this structure is quite uneven. The designing parameters of varying sectioned leaf spring was obtained by means of optimal design of leaf spring parameters. Under the action of 0.2N external loading, a simulation experiment was carried out respectively on varying sectioned leaf spring by adopting the Aigor finite element software. The testing results show that the ratio of maximum stress and minimum stress was reduced to 7.7 from 31.4 of the straight leaf spring. The torsional stiffness was 0.06 N/m and its changing rate of measuring force was 36.6 N/m, thus the mechanic properties of this mechanism was improved to a great extent.

关 键 词：台阶测量仪 弹性支承 有限元 集成电路 十字片簧 

分 类 号：TN407[电子电信—微电子学与固体电子学] TH122[机械工程—机械设计及理论]