硅油基底上受限金属薄膜自组装褶皱的原子力显微镜研究  

Atomic force microscopy studies on self-organized wrinkles in constrained metallic films deposited on silicone oil substrates

作　　者：余森江[1,2] 

机构地区：[1]同济大学物理科学与工程学院,上海200092 [2]中国计量学院物理系,杭州310018

出　　处：《物理学报》2014年第11期235-242,共8页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:11204283)资助的课题~~

摘　　要：利用喷雾装置在清洁载玻片上喷洒出各种尺寸(微米到毫米量级)的硅油滴,采用直流磁控溅射方法在硅油滴上沉积金属铬薄膜,研究了薄膜中由热应力引起的自组装褶皱.实验发现硅油滴上的铬薄膜受到油滴边缘的约束而具有受限的边界条件,其对褶皱的形貌具有很好的调控作用:褶皱呈垂直于边界的辐射状条纹;越靠近约束边界,褶皱的波长和振幅越小.褶皱的形貌特征还与薄膜厚度和硅油滴尺寸密切相关.随着膜厚的增加,褶皱在约束边界处首先形成,并逐渐扩展到油滴中心区域;相同尺寸油滴中心处的褶皱波长基本不变,而振幅随膜厚先增大随后减小.薄膜厚度相同时,随着油滴尺寸的增加,褶皱的波长和振幅都相应增加.进一步的研究表明:在沉积过程中,高能粒子的轰击和溅射源的热辐射导致硅油表面层的结构发生改变而形成聚合物层,在此基础上对褶皱的形貌特征和振幅演化给出合理的解释.Silicone oil droplets with varied sizes （micrometer to millimeter） were sprayed onto a clean glass slide and then Cr films were deposited on the droplets by DC-magnetron sputtering. Self-organized wrinkles induced by thermal stress have been investigated using atomic force microscope. It is found that the Cr films are limited by the droplet edges and thus possess constrained edges, which can well control the wrinkle morphologies： the wrinkles may exhibit radiated strips perpendicular to the edge. The wavelength and amplitude will decrease when approaching to the constrained edge. Morphologies of the wrinkles are closely related to the film thickness and oil drop size. As the film thickness increases, the wrinkles first form near the edge, and then propagate to the central region. The wavelength at the droplet center is almost unchanged for different oil sizes, but the amplitude first increases and then decreases with increasing film thickness. When the film thickness is fixed, the wavelength and amplitude may increase accordingly with increasing droplet size. Further studies show that the top surface of the silicone oil is modified to form a polymer layer during the deposition due to the bombardment from high-energy particles and heat radiation from the sputtering source. Morphologies of the wrinkles and amplitude evolutions are then explained in detail.

关 键 词：液体基底 金属薄膜 自组装 约束边界 

分 类 号：O484[理学—固体物理]