氧气分压对AZO薄膜晶体结构和光学性能的影响  

The influence of oxygen partial pressure on the structural and optical properties of AZO thin films

作　　者：李小鹏[1] 黄瀛[1] 韦小凤[1] 何欢[1] 符跃春[1] 詹锋[1] 沈晓明[1] 

机构地区：[1]广西大学材料科学与工程学院,有色金属及材料加工新技术教育部重点实验室,广西南宁530004

出　　处：《广西大学学报（自然科学版）》2014年第3期559-562,共4页Journal of Guangxi University（Natural Science Edition）

基　　金：国家自然科学基金资助项目(11364003);广西科学基金资助项目(桂科基018001);广西理工科学实验中心重点项目(LGZX201105);广西有色金属及材料加工新技术教育部重点实验室主任基金项目(GXKFJ-25;GXKFZ-04)

摘　　要：为了研究掺铝氧化锌(AZO)薄膜在制备过程中不同氧气分压下的晶体结构、表面形貌和光学性能的变化,采用脉冲激光沉积法(PLD)在玻璃基片上沉积AZO薄膜。结果表明,当氧气分压为0.8 Pa时,AZO薄膜沿(002)面择优取向生长,具有最好的结晶质量,薄膜表面平整且结构致密,并且呈现出排列均匀的纳米晶粒。同时发现,随着氧气分压从0.2 Pa升高至8.0 Pa,AZO薄膜的紫外吸收边逐渐向长波方向移动。而在可见光范围内,氧气分压对AZO薄膜在可见光区透射率影响不大,透射率均在80%以上。To study the crystalline structure,surface morphology and optical property changes of AZO thin films prepared under various O2partial pressures,pulsed-laser deposition（ PLD） was used to deposit AZO thin films on glass substrates. The results showed that AZO thin films grew along with preferential orientation（ 002） and had optimal crystalline quality when oxygen partial pressure kept at 0. 8 Pa. In addition,the films had smooth surface and compacted structure and nanocrystalline grains disposed evenly on the surface of films. It also can be found that the ultraviolet absorption edge moved to the longer wavelength with the increase of oxygen partial pressure from 0. 2 Pa to 8. 0 Pa.Oxygen partial pressure had little influence on the transmittance of AZO thin films in visible light region and the transmittance of all the AZO thin films is above 80%.

关 键 词：AZO薄膜 氧气分压 光学性能 透射率 

分 类 号：O484[理学—固体物理] TB43[理学—物理]