Ba_(0.9)Sr_(0.1)TiO_3薄膜的椭偏光谱研究  

Spectroscopic Ellipsometry Studies of Ba_(0.9)Sr_(0.1)Ti0_3 Thin Films

作　　者：阳生红[1] 李辉遒[1] 张曰理[1] 莫党[1] 田虎永[2] 罗维根[2] 蒲兴华[2] 丁爱丽[2] 

机构地区：[1]中山大学物理系,广州510275 [2]中国科学院上海硅酸盐研究所无机功能开放实验室,上海200050

出　　处：《无机材料学报》2001年第2期305-310,共6页Journal of Inorganic Materials

摘　　要：用椭偏光谱仪首次在光子能量为２．１～５．２ｅＶ的范围内，测量了不同热处理温度下Ｂａ０．９Ｓｒ０．１ＴｉＯ３（ＢＳＴ）薄膜的椭偏光谱，建立适当的拟合模型，并用Ｃａｕｃｈｙ色散模型描述ＢＳＴ薄膜的光学性质，用最优化法获得了所有样品的光学常数（折射率η和消光系数κ）谱及禁带能Ｅｇ．比较这些结果，初步得到了ＢＳＴ薄膜的折射率η、消光系数κ和禁带能Ｅｇ随退火温度变化的变化规律．Ellipsometric spectra of Ba0.9Sr0.1TiO3 (BST) thin films with various annealing temperatures were measured in the range of photon energy from 2.1 to 5.2eV. Constructing appropriate fitting models and describing optical properties of the BST with Cauchy dispersion model, their optical constants (refractive index n and extinction coefficient k) spectra and band gap E-g were determined by means of an optimization. Compared these results, we obtained the variation of the refractive index n, the extinction coefficient k and the band gap E-g with annealing temperatures.

关 键 词：椭偏光谱 光学常数谱 BST薄膜 陶瓷薄膜 光学性质 

分 类 号：TQ174.13[化学工程—陶瓷工业] O484.41[化学工程—硅酸盐工业]