在硅片上电沉积不同形貌的ZnO纳米结构的研究  

Electrochemical Deposition of ZnO Nanostructures with Different Morphologies on Si(111) Substrate and Their Photoluminescence Properties

作　　者：陈寰[1] 罗建勇[1] 姜龙[1] 孙玉阳[1] 曾天[1] 晋勇[1] 焦志峰[1] 龚敏[2] 刘俊刚[3] 孙小松[1] 

机构地区：[1]四川大学材料科学与工程学院,成都610064 [2]四川大学物理科学与技术学院,成都610064 [3]重庆光电技术研究所,重庆400060

出　　处：《半导体光电》2014年第3期446-450,506,共6页Semiconductor Optoelectronics

摘　　要：采用简单的电化学沉积方法,通过调节电解液浓度和pH值,在硅衬底上实现了ZnO纳米结构的形貌控制。通过X射线衍射、扫描电镜和光致发光谱等表征手段对不同形貌的ZnO纳米结构进行了研究。研究发现,通过调节沉积条件,可以获得纳米棒、纳米簇丛和纳米片等不同形貌的ZnO纳米结构。其中,溶液pH值是纳米ZnO从一维结构到二维结构转变的关键因素。当pH值为12时,所获得的纳米ZnO为二维片状结构。光致发光谱显示二维ZnO纳米片的紫外本征峰相对于一维ZnO纳米棒发生了明显的蓝移,并且可见区的发光峰大大降低。这一结构将在光电器件、传感器等领域有很好的应用前景。The controllability over the morphology of ZnO nanostructures has been achieved on a n-type Si（111）substrate by adjusting the concentration of electrolyte,the deposition potential and the pH value of electrolyte with a simple electrochemical deposition process.The prepared samples were characterized with X-ray diffraction（XRD）,scanning electron microscope（SEM）and photoluminescence（PL）spectrum. The results show that various ZnO nanostructures such as nanorod,nanoclusters and nanosheets can be synthesized by properly controlling the deposition conditions among which the pH value of the solution would act as the key factor to convert ZnO nanostructures from 1D to 2D structure.As the pH value was fixed at 12,the obtained ZnO is of the 2D sheet-like morphology.In addition,the PL spectra of the samples show a distinct blue-shift of the ultra-violet intrinsic peak of the ZnO nanosheets compared with that of the ZnO nanorods.It is also found that the emission band in the visible area decreases to a large extent.The structure is of great potential in the field of optoelectronic facilities and sensors.

关 键 词：ZNO 电化学沉积 形貌 光致发光 

分 类 号：TN462[电子电信—微电子学与固体电子学]