生物芯片微流道的微细加工工艺  

The Micro Machining Processes of Microchannels on Biochips

作　　者：江树镇[1] 郭钟宁[1] 郑文书[1] 黄红光[1] 

机构地区：[1]广东工业大学机电工程学院,广东广州510006

出　　处：《电加工与模具》2014年第3期66-70,共5页Electromachining & Mould

基　　金：国家自然科学基金重点资助项目(U1134003)

摘　　要：在生物芯片发展初期,其基底材料主要是玻璃,这是由于其加工方法是从半导体工业转移而来和玻璃材料的表面特性决定的。随着大批量、低成本的需求,基底材料转向聚合物材料,其加工方法也相应地发生转变。通过对比,介绍了生物芯片微流道微细加工的几种不同方法的原理及特点。In the initial development of biochips, the mainly substrate material was glass due to its machining methods was derived from the semiconductor industrial and its surface property. With the requirement of mass production and lower cost,the substrate materials turned to polymers and its machining methods changed correspondingly. By comparing, the principles and characteristics of several typical methods used in the micro machining of biochip microchannels was introduced.

关 键 词：微细加工 微流道 刻蚀 微成形 

分 类 号：TG662[金属学及工艺—金属切削加工及机床]