尺蠖型压电直线电动机制作及性能测试  

Machining and Functional Testing of Inchworm-Type Piezoelectric Linear Motor

作　　者：李全松[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,长春130033

出　　处：《微特电机》2014年第6期21-24,共4页Small & Special Electrical Machines

基　　金：国家科技重大专项项目(2009ZX02205)

摘　　要：为了实现机械元件的高精密驱动,设计和研究了一种应用自然界中尺蠖原理的压电驱动直线电动机,完成压电直线电动机的样机制作并对其进行了试验测试。试验结果表明,制作和测试的尺蠖型压电直线电动机工作行程20 mm,最大驱动力38 N,在驱动电压200 V时,具有最大的运动步长35.15μm,步长稳定性误差小于3%,在驱动电压为10 V时,实现最小的运动步长20 nm。电机在无负载状态,驱动频率30 Hz,驱动电压200 V时达到的最大驱动速度484.2μm/s。该电机具备良好的工作性能,在精密驱动领域具有广泛的应用前景。In order to realize the high precision actuation of the mechanical elements,a piezoelectric linear motor was designed and investigated,imitating the movement principle of the inchworm that existed in the nature.The linear motor prototype was produced and the testing was carried out.The experimental results indicate that the designed Inchworm-type piezoelectric motor performed considerable well,with its maximum working range 20 mm,maximum active force of 38 N.The maximum movement step of 35.15 μm and stability error that less than 3％ was recorded under the input voltage of 200 V.The motor＇s resolution ratio （20 nm） was also appeared with a 10 V driving voltage.With a driving frequency of 30 Hz and a input voltage of 200 V,the motor can reach its maximum speed at 484.2 μm/s when none load was put onto the motor,which demonstrated its favorable working performance and it doubtlessly has broad application prospective in the area of precision motor.

关 键 词：精密驱动 压电叠堆 直线电动机 尺蠖运动 

分 类 号：TM359.4[电气工程—电机]