双Fabry-Perot干涉纳米测量控制系统的设计  

Design of a Nano Measurement Control System Based on Dual Fabry Perot Interferometer

作　　者：陈本永[1] 朱若谷[2] 吴昭同[1] 

机构地区：[1]浙江大学机械系精密测量教研室,浙江杭州310027 [2]中国计量学院计测系精密仪器教研室,浙江杭州310034

出　　处：《光电工程》2001年第1期43-49,共7页Opto-Electronic Engineering

基　　金：国家自然科学基金资助项目 !(597750 87)

摘　　要：设计了一种基于双 Fabry- Perot干涉仪的新型纳米测量系统 ,阐述了系统各环节的数学模型。针对探针与样品表面相互作用的数学模型比较复杂的特点 ,详细设计了基于模糊控制理论的控制系统 ,提出了通过控制探针振动曲线中线不变进行纳米测量的理论依据及实测方法。在此基础上 ,对系统进行了仿真实验 。A novel nano-measurement system based on dual Fabry-Perot interferometer is designed and a mathematical model for various links of the system described. Considered with the characteristics that the mathematical model for the mutual action between probe and sample surface is complicated, a control system based on fuzzy control theory is designed. Some theoretical basis and practical measurement method for carrying out nano-measurement through control curve central line of probe vibration is proposed. Simulation experiments for the system are carried out on this basis. The experimental results fully demonstrate the correctness of system and theoretical basis.

关 键 词：纳米测量 Fabry-Perot干涉仪 模糊控制 数学模型 

分 类 号：TH744.3[机械工程—光学工程]