XYH-86小面积X荧光涂层测厚仪  

XYH-86 X-ray fluorescence coating thickness gauge for small areas

作　　者：乐安全[1] 林金锌[1] 朱节清[1] 谷英梅[1] 顾连学[1] 韩发生 徐君权[1] 王裕政 王志芳 

机构地区：[1]中国科学院上海原子核研究所

出　　处：《核技术》1991年第9期513-519,共7页Nuclear Techniques

摘　　要：本仪器利用X射线荧光分析原理和微机技术研制而成的。以小型X射线管作激发源,射线用小孔准直,样品用光学定位,样品最小测量面直径为0.1mm。微机多道实时显示能谱。它能快速、精确、无损测量多种微小面积上的单、双涂层厚度和合金涂层厚度及成分,结果由屏幕显示并打印输出,还能作统计处理。This instrument was based on the XRF technique and microcomputer. X-ray radiation from a small X-ray tube was collimated with a small hole and the emitted fluorescence spot at the surface of a sample could be seen with an optical microscope. The minimum diameter of the measuring area was 0.1mm. A microcomputer-based MCA was used. The unit was able to measure thickness of either single or double coating layers noEdestructively and determine thickness and composition of an alloy coating layer simultaneously.

关 键 词：小面积 X射线荧光 涂层测厚仪 

分 类 号：TH741[机械工程—光学工程]