大数值孔径微透镜阵列激光扫描  

Laser Scanning System with Large Numerical Aperture Microlens Arrays

作　　者：周崇喜[1] 乔立杰[2] 邓启凌[1] 吴海鹰[1] 谢伟民[1] 

机构地区：[1]中国科学院光电技术研究所微细加工光学技术国家重点实验室,四川成都610209 [2]哈尔滨工业大学应用物理系,黑龙江哈尔滨150001

出　　处：《光电工程》2001年第2期1-3,共3页Opto-Electronic Engineering

摘　　要：提出微透镜阵列与转镜相结合的大口径激光光束扫描方法。采用机械制模法制作微透镜阵列模板 ,然后采用模压法制作光学微透镜阵列 ,其子口径为 2 mm× 2 mm,数值孔径为 0 .2 ,阵列数为 8× 8。并进行了扫描测试实验 ,扫描角达± 6.56°。A large aperture laser beam scanning method that combines microlens arrays and rotating mirror is put forward. The microlens arrays model is first fabricated with mechanical moulding method and then the optical microlens arrays are fabricated by using of model pressing. Its sub-aperture is 2 mm×2 mm, numerical aperture is 0.2 and array number is 8×8. The scanning testing experiments are first carried out and the scanning angle is up to ±6.56°.

关 键 词：微透镜阵列 激光扫描 数值孔径 

分 类 号：TN256[电子电信—物理电子学]