电子束曝光机束斑的自动测控系统  

AUTOMATIC MEASURING AND MONITORING SYSTEM OF BEAM SPOT OF ELECTRON BEAM EXPOSURE MACHINE

作　　者：陈振生[1] 杨立才[1] 张玉林[1] 

机构地区：[1]山东工业大学自动化系

出　　处：《微细加工技术》1996年第4期16-22,共7页Microfabrication Technology

摘　　要：根据亚微米电子束曝光机束斑直径、束流大小与各磁透镜电流之间的关系以及刀口法测试束斑的原理，设计了一套总线式的束斑自动测控系统。该系统以ＩＢＭ—ＰＣ／ＡＴ作为主控机，系统包括用于总线扩展的总线驱动板、电子束扫描控制板和束流信号数据采集板。A automatic measuring and monitoring system of the beam spot has been designed on the base of the relation of spot diameter, beam current and lenses currents and the principle of measuring the beam spot by knife-edge method. The system has bus construction and uses IBM-PC/AT as master-computer, including the bus drive board for bus expanding, electron beam ecanning control board and beam current data acquisition board.

关 键 词：电子束曝光机 束斑 自动测控系统 

分 类 号：TN305.7[电子电信—物理电子学]