离子注入机中高压电源主电路工作频率的确定  

DESIGN OF OPERATING FREQUENCY OF MASTER CIRCUIT OF H. V. POWER SUPPLY IN ION IMPLANTER

作　　者：罗子孝[1] 

机构地区：[1]电子工业部第四十八研究所

出　　处：《微细加工技术》1996年第4期49-55,共7页Microfabrication Technology

摘　　要：离子注入机中高压直流稳压电源的主电路采用了脉宽调制式变换电路。本文从控制主要元器件的功耗入手，讨论如何选择变换器的工作频率和设计主要器件的参数，以确保电源的低功耗和高效率。ln master circuit of constant H. V. DC. P. S. in the ion implanter, we have utilized pulse width modulator, We have described how to control loss of power on main devices first. And then we have described how to select operating frequency of the conversion circuit and to design the parameters of main devices in order to ensure lower power loss and higher efficiency.

关 键 词：离子注入机 工作频率 高压电源电路 半导体器件 

分 类 号：TN305.3[电子电信—物理电子学]