空芯光纤中沉积多晶态GeO_2薄膜的实验研究  

An experimental study on chemical vapor deposition of poly-crystalline GeO_2 thin film in hollow-core optical fibers

作　　者：周桂耀[1] 侯峙云[1] 侯蓝田[1] 何军[2] 关兵[2] 

机构地区：[1]燕山大学红外光纤与传感研究所,河北秦皇岛066004 [2]吉林大学物理系,吉林长春130023

出　　处：《材料科学与工艺》2001年第1期52-55,共4页Materials Science and Technology

基　　金：国家高科技研究发展计划新材料领域资助项目! (86 3 -715 -0 0 1-0 2 12 )

摘　　要：通过缩短高温炉与冷却器的距离 ,使化学反应区与沉积区的温度梯度增加到约 9℃ /mm ,进而使GeCl4 与O2 可在内径为 1.0mm的空芯石英管内壁沉积上颗粒度约 0 .1μm、厚度为 3.0 μm的多晶态GeO2 介质膜 ,使表面更加光滑 ,提高了光纤的传输性能 ,光纤的传输损耗小于 0 .8dB/m .By reducing the distance between the high temperature furnace and the condenser, the temperature gradient between high temperature and cold sections can be increased to 9 ℃/mm, so the poly-crystalline GeO 2 with a grain size about 0.1 μm and thickness 3.0 μm can be deposited with GeCl 4 and O 2 on inner wall of hollow-core quartz capillary with an inner diameter of 1.0 mm. After that the inner surface becomes smooth, the transmission capability of hollow-core fibers can be improved, and the transmission loss will be successfully reduced to less than 0.8 dB/m.

关 键 词：空芯光纤 多晶态二氧化锗薄膜 温度梯度 流速 化学气相沉积 

分 类 号：TN253[电子电信—物理电子学] TB43[一般工业技术]