MCT液相外延薄膜的研制  

Growth and Properties of Hg_(1-x)Cd_xTe LPE Films

作　　者：王跃[1] 汤志杰[1] 庄维莎[1] 何景福[1] 

机构地区：[1]昆明物理研究所

出　　处：《红外技术》1991年第6期18-22,共5页Infrared Technology

基　　金：国家863高技术项目。

摘　　要：用开管水平卧式液相外延系统在不同生长条件下生长了不同 x 值的MCT 液相外延薄膜。通过对外延生长工艺的控制,外延薄膜的表面形貌有较大改善,残留母液大为减少;外延薄膜的结构参数、电学参数和光学参数均有较大改善和提高。分析表明外延膜有较高的质量。短波材料和中波材料均已作出性能较高的器件。The epitaxial films of Mercury Cadmium Telluride (MCT) with various x values have beem grown from To-rich colution in an open tube sliding system,Controlling the growth procedure makes the morphology, structure and the Electric and optic properties of MCT epi-films improve obviously,The melt remained on the film surface is reduced,The examialion to MCT epi-films shows that the films quality is excellent.The short-wave and middle-wave detectors made of LPE films have been produced successfully.

关 键 词：HGCDTE 液相外延 薄膜 红外材料 

分 类 号：TN304.055[电子电信—物理电子学]