PSTM 用于Al_2O_3光波导薄膜的研究  

Study on Al_2O_3 Wave-guide Film with PSTM

作　　者：潘石[1] 王继松[1] 吴世法[1] 简国树[1] 

机构地区：[1]大连理工大学物理系,大连116023

出　　处：《光电子．激光》2001年第4期351-353,共3页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金!资助项目 (3 9670 2 0 8)

摘　　要：利用光子扫描隧道显微镜 (PSTM)检测研究 Al2 O3光波导薄膜及其制备工艺。分析了不同温度条件下采用离子束增强沉积工艺制备的 Al2 O3光波导薄膜 PSTM图像。结果表明 :适当的增加基片的温度可以减小散射损耗 ,改善 Al2A method for measuring Al2O3 optical waveguide film and studying its fabrication technique was proposed. The photon scanning tunneling microscope (PSTM) images of Al2O3 optical waveguide film made by ion-beam-enhanced-deposition (IBED) technique at different temperature were analyzed. The results show that by properly increasing the temperature of the substrate the scattering loss was decreased and the property of optical Al2O3 wave-guide was improved.

关 键 词：光子扫描隧道显微镜 光波导薄膜 氧化铝 

分 类 号：TN16[电子电信—物理电子学] TN304.055