全光通信用MEMS光开关  

MEMS Optic Switches for Future Fiber Optic Communication System

作　　者：李向东[1] 李福果[1] 龙再川[1] 王海卿[1] 

机构地区：[1]重庆光电技术研究所,重庆400060

出　　处：《半导体光电》2001年第2期73-77,共5页Semiconductor Optoelectronics

摘　　要：在简要介绍了硅微机械加工技术的基础上 ,详细介绍了微透镜和微反射镜两种MEMS光开关的结构和工作原理。从发展和实用的角度对典型的波导调制型MZI光开关和MEMS光开关的特性进行了比较 。Brief summarization of silicon micro electro mechanical system(MEMS) technologies is presented. Basic structures and mechanism of microlens and micro mirror MEMS optic switches are described in detail. A comparison between wave guide modulation optic switch and MEMS optic switch is made. Finally prospects of the MEMS optic switch for future optic communication system are forecasted.

关 键 词：光纤通信 微电子机械系统 光开关 全光通信 

分 类 号：TN929.11[电子电信—通信与信息系统] TN251[电子电信—信息与通信工程]