薄膜电阻加热器的高精度温控  

Accurate temperature control of film resistance heater

作　　者：黎全[1] 钟钦[1] 林亚风[1] 魏文俭[1] 邓立新[1] 陈前荣[1] 

机构地区：[1]国防科技大学理学院光电工程系,湖南长沙410073

出　　处：《红外与激光工程》2001年第2期131-133,共3页Infrared and Laser Engineering

摘　　要：文中介绍了用掺锡的氧化铟导电膜作为加热方式并采用比例积分微分方式通过A D卡输出电平控制加热电压 ,实现高精度温控 ,重点是针对小热容加热体的特点采用相应的措施通过比例积分微分控制实现精确控温。初步研制成了高发射率、可持续工作并能实现精确控温的高精度薄膜电阻加热板。The accurate temperature control method uses the ITO thin film to heat up the glass and uses PID to control the heating voltage by the output voltage of A/D circuit board. How to control temperature accurately by PID when the heater's thermal capacity is small is the main point of this paper. The pellicle resistance heater which can work continuously and has high emissivity is primarily developed. Its temperature can be accurately controlled.

关 键 词：薄膜电阻 加热板 高精度温控 

分 类 号：TM924[电气工程—电力电子与电力传动]