基于干涉条纹跟踪实现纳米级位移测量的方法研究  

Algorithm for automatic tracing of interference fringe and its application to nanometer measurement

作　　者：陈本永[1] 李达成[1] 朱若谷[2] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084 [2]中国计量学院计量与测控系,杭州310034

出　　处：《光学技术》2001年第3期223-225,228,共4页Optical Technique

基　　金：国家自然科学基金资助项目! (597750 87)

摘　　要：设计了一套干涉条纹图像实时采集处理系统。在分析迈克尔逊干涉条纹特征表象的基础上 ,给出了通过跟踪干涉条纹的移动量测量被测对象纳米级位移量的理论公式 ;提出了干涉条纹特征点的提取与跟踪算法 :分段线性变换、方形窗口中值滤波和门限化边缘提取 ,给出了基于统计学原理的通过计算多条干涉条纹移动量获得被测对象纳米级位移量的计算公式。An interference fringe real time sampling and processing system is designed With the analysis of the feature of interference fringe of Michelson interferometer, the theoretical formula of the measurement of nanometer displacements by means of tracing interference fringe is given An algorithm for automatic tracing of the characteristic point on fringes from a digitized interferogram is proposed The main feature of this algorithm is to process fringes with linear transforming, middle-value filtering and threshold edge extracting Based on statistic principle, the method of nanometer measurement is described by computing quantities of several fringes movement An experimental example is introduced which demonstrates the possibility and practicability of the method in nanometer measurement

关 键 词：干涉条纹 纳米测量 图像处理 位移测量 干涉仪 

分 类 号：TH744.3[机械工程—光学工程] TG806[机械工程—仪器科学与技术]