硅片V型槽光纤-波导耦合器  

V-Groove Structures on Silicon for Fiber-to-Waveguide Couplers

作　　者：杨文英[1] 潘雪飞[1] 

机构地区：[1]长春邮电学院

出　　处：《吉林工业大学学报》1991年第2期31-34,共4页

摘　　要：本文从硅晶体的结构说明V型槽形成的机理,该槽具有结晶学的平直、光滑、定位可控制在光刻精度的优点,经合理的方法较成功地实现了V型槽的制备,为光纤-波导的耦合提供较理想、稳定、低耗的器件。In this paper, the principle of V-groove formation from the structures of silicon is presented. There are advantages of crystallographic flatness, smoothness and orientation of controlable photolithographic accuration of the groove. The successful fabrication of V-groove from reasonable ways can provide an ideal, stable and low-loss device for fiber-to-waveguide couplers.

关 键 词：集成光学器件 光纤 波导 耦合器 

分 类 号：TN256[电子电信—物理电子学]