对向靶溅射α″-Fe_(16)N_2薄膜结构及其热稳定性  

STUDY OF THE STRUCTURE AND STABILITY OF THE α″-Fe_(16)N_2 THIN FILMS PREPARED BY FTS

作　　者：许英华[1] 姜恩永[1] 王怡[1] 侯登录[1] 赵慈[1] 

机构地区：[1]天津大学理学院,天津300072

出　　处：《天津大学学报（自然科学与工程技术版）》2001年第4期558-561,共4页Journal of Tianjin University：Science and Technology

摘　　要：用对向靶反应溅射法制备了α″- Fe1 6 N2 薄膜 ,用 X射线衍射 (XRD)、透射电子显微镜(TEM)和振动样品磁强计 (VSM)对α″- Fe1 6 N2 的结构、磁性以及结构的热稳定性进行了分析讨论 .结果表明 ,随退火温度的升高 ,α″- Fe1 6 N2 相逐渐分解为 α″- Fe和 γ′- Fe4N两相 .对磁性的分析表明 ,造成饱和磁化强度存在较大差异的原因与其内在的结构差别有很大的关系 .The structure and high saturation magnetization of α″ Fe 16 N 2 are the most disputable problems in magnetic material research. This article describes the α″ Fe 16 N 2 thin films prepared by Facing Targets Sputtering, and studies its structure,magnetism and stability properties by XRD, TEM and VSM. It shows that the magnetization of it shows, α″ Fe 16 N 2 is related closely with the thickness of the film.And the α″ Fe 16 N 2 phase is decomposed into α″ Fe and γ Fe 4N with the temperature rise;the analysis of the magnetic properties also shows that the point of the sharp change corresponds to the temperature which the α″ Fe 16 N 2 phase is discomposed.

关 键 词：饱和磁化强度 对向靶溅射 Fe16N2薄膜 热稳定性 结构 

分 类 号：O484[理学—固体物理]